5 May 2015 FBG based novel sensor design for low vacuum measurement with high sensitivity
Author Affiliations +
Abstract
This article demonstrates use of a fiber Bragg grating (FBG) sensor for in situ monitoring of vacuum process with high sensitivity. The sensor head consists of a commercial syringe barrel with plunger, metal spring, pressure chamber, FBG and safeguarding outer tube. The sensor is configured by firmly fixing the FBG between the plunger and the rigid support provided to the safeguarding tube. Under vacuum process the metal spring facilitates the FBG to get strained in axial direction which results in shift of Bragg wavelength of FBG. The Bragg wavelength shift of FBG is found to be linear with respect to vacuum pressure with a linear coefficient of 0.9988. Pressure sensitivity of the sensor is found to be 27 pm/cm Hg. The sensor design is simple, low-cost and has the advantage of all fiber optic sensors.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vengal Rao Pachava, Vengal Rao Pachava, Srimannarayana Kamineni, Srimannarayana Kamineni, Sai Shankar Madhuvarasu, Sai Shankar Madhuvarasu, Venkata Reddy Mamidi, Venkata Reddy Mamidi, } "FBG based novel sensor design for low vacuum measurement with high sensitivity", Proc. SPIE 9506, Optical Sensors 2015, 95061K (5 May 2015); doi: 10.1117/12.2182406; https://doi.org/10.1117/12.2182406
PROCEEDINGS
5 PAGES


SHARE
Back to Top