12 May 2015 Low-stress coatings for sputtered-sliced Fresnel zone plates and multilayer Laue lenses
Author Affiliations +
The application of thin film coating processes for the fabrication of diffractive X-ray optical elements like sputteredsliced zone plates or multilayer Laue lenses (MLL) is a very promising approach for X-ray focusing down to spot sizes of < 10 nm. However, for practical useful focal length in the order of several millimeters or a few centimeters, multilayer thicknesses of several 10 μm up to a few 100 μm are necessary in order to have large enough numerical apertures of the lenses. Currently one of the main challenges is to coat low-stress multilayers with large total thicknesses in the order of 100 μm. Usually sputter deposition results in thin films with significant compressive stress. With new material combinations such as Mo/MoSi2/Si/MoSi2 and W/WSi2/Si/WSi2 the overall stress can be reduced to almost zero if the individual thicknesses are properly adapted. In the case of these four-layer-systems only the period thickness dp follows the zone plate law. In case of Mo/MoSi2/Si/MoSi2, stress-free multilayers are obtained with dMo = 0.5*dp, dMoSi2 = 0.16*dp and dSi = 0.34*dp.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefan Braun, Stefan Braun, Adam Kubec, Adam Kubec, Peter Gawlitza, Peter Gawlitza, Maik Menzel, Maik Menzel, Andreas Leson, Andreas Leson, "Low-stress coatings for sputtered-sliced Fresnel zone plates and multilayer Laue lenses", Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 95100L (12 May 2015); doi: 10.1117/12.2178851; https://doi.org/10.1117/12.2178851


In-situ stress study on WSi2/Si multilayers
Proceedings of SPIE (September 04 2014)
W/C multilayers deposited on plastic films
Proceedings of SPIE (January 20 1993)
Repair of x ray multilayer optics by use of overcoating...
Proceedings of SPIE (November 10 1994)
Si-based multilayers with high thermal stability
Proceedings of SPIE (November 07 2000)

Back to Top