We present a desk-top system, capable of resolving 60 nm features in few seconds exposure time. We exploit the advantages of a compact, laser-plasma SXR source, based on a double stream nitrogen gas puff target, developed at the Institute of Optoelectronics, Military University of Technology. The source, emitting quasi-monochromatic, incoherent radiation, in the “water widow” spectral range at λ = 2.88 nm, is coupled with ellipsoidal, grazing incidence condenser and Fresnel zone plate objective. The construction of the microscope with some recent images of test and real samples will be presented and discussed.
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Przemyslaw Wachulak, Alfio Torrisi, Muhammad Fahad Nawaz, Daniel Adjei, Andrzej Bartnik, Jerzy Kostecki, Łukasz Wegrzynski, Šárka Vondrová, Jana Turňová, Tomasz Fok, Alexandr Jančarek, Henryk Fiedorowicz, "A compact “water-window” microscope with 60-nm spatial resolution based on a double stream gas-puff target and Fresnel zone plate optics," Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 95100M (12 May 2015);