Periodic Co/C, Cr/C, and CoCr/C soft x-ray multilayers prepared by N reactive sputtering

Mingwu Wen; Li Jiang; Zhong Zhang; Qiushi Huang; Zhanshan Wang; Hongchang Wang; Mingqi Cui; Rongqing Yi

doi:10.1117/12.2178633

12 May 2015 Periodic Co/C, Cr/C, and CoCr/C soft x-ray multilayers prepared by N reactive sputtering

Mingwu Wen, Li Jiang, Zhong Zhang, Qiushi Huang, Zhanshan Wang, Hongchang Wang, Mingqi Cui, Rongqing Yi

Proceedings Volume 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV; 95100X (2015) https://doi.org/10.1117/12.2178633
Event: SPIE Optics + Optoelectronics, 2015, Prague, Czech Republic

Abstract

Lightweight Asymmetry and Magnetism Probe project (LAMP) was proposed in China to observe the polarized radiation around 250 eV emitted by soft X-ray celestial sources, like puslars, active galactic, black hole binaries, etc. To produce the high efficiency soft X-ray polarizer for LAMP, we are developing Co/C, Cr/C, CoCr/C X-ray multilayers using magnetron sputtering and reactive sputtering with nitrogen. Hard X-ray grazing incidence reflectometry (GIXR) and soft X-ray reflectance measurements were used to study the interface and microstructure of different multilayers. In comparison to the multilayers deposited by normal magnetron sputtering, reactively-sputtered multilayers show higher reflectivity around 250 eV and lower interfacial roughness. As a result, Co/C, Cr/C, CoCr/C multilayers with smaller period can be made with respect to the multilayer fabricated using non-reactive sputtering. The X-ray performance of reactive sputtered Co/C and CoCr/C multilayers can be further improved by optimizing the deposition process.

Citation Download Citation

Mingwu Wen, Li Jiang, Zhong Zhang, Qiushi Huang, Zhanshan Wang, Hongchang Wang, Mingqi Cui, and Rongqing Yi "Periodic Co/C, Cr/C, and CoCr/C soft x-ray multilayers prepared by N reactive sputtering", Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 95100X (12 May 2015); https://doi.org/10.1117/12.2178633

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