12 May 2015 EUV ablation: a study of the process
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Abstract
An investigation on short-wavelength ablation mechanism of poly(1,4-phenylene ether ether-sulfune) PPEESand poly (1-hexadecene-sulfone) PHDS (Figure 9-10) by EUV radiation is presented. The goal of this work is to evaluate the ablation behavior with respect to the influence of wavelength, fluence and quantum efficiency. Because there is no yet a general EUV ablation theory, data are analyzed in order to underline regularity of the process which can be used in future to detect the scaling laws of the process. The differences with longer wavelengths ablation and EUV one are pointed out and possible applications of EUV ablation are proposed.
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Chiara Liberatore, Chiara Liberatore, Andrzej Bartnik, Andrzej Bartnik, Inam Ul Ahad, Inam Ul Ahad, Martina Toufarová, Martina Toufarová, Irena Matulková, Irena Matulková, Věra Hájková, Věra Hájková, Luděk Vyšín, Luděk Vyšín, Tomáš Burian, Tomáš Burian, Libor Juha, Libor Juha, Ladislav Pina, Ladislav Pina, Akira Endo, Akira Endo, Tomas Mocek, Tomas Mocek, "EUV ablation: a study of the process", Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 951011 (12 May 2015); doi: 10.1117/12.2178868; https://doi.org/10.1117/12.2178868
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