12 May 2015 Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence
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This paper deals with prediction of extreme ultraviolet (XUV) laser ablation of lithium fluoride at nanosecond timescales. Material properties of lithium fluoride were determined based on bibliographic survey. These data are necessary for theoretical estimation of surface removal rate in relevance to XUV laser desorption/ablation process. Parameters of XUV radiation pulses generated by the Prague capillary-discharge laser (CDL) desktop system were assumed in this context. Prediction of ablation curve and threshold laser fluence for lithium fluoride was performed employing XUV-ABLATOR code. Quasi-random sampling approach was used for evaluating its predictive capabilities in the means of variance and stability of model outputs in expected range of uncertainties. These results were compared to experimental data observed previously.
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Tomáš Blejchař, Tomáš Blejchař, Václav Nevrlý, Václav Nevrlý, Michal Vašinek, Michal Vašinek, Michal Dostál, Michal Dostál, Lukáš Pečínka, Lukáš Pečínka, Jakub Dlabka, Jakub Dlabka, Martin Stachoň, Martin Stachoň, Libor Juha, Libor Juha, Petr Bitala, Petr Bitala, Zdeněk Zelinger, Zdeněk Zelinger, Peter Pira, Peter Pira, Jan Wild, Jan Wild, "Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence", Proc. SPIE 9511, Damage to VUV, EUV, and X-ray Optics V, 95110K (12 May 2015); doi: 10.1117/12.2178437; https://doi.org/10.1117/12.2178437

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