12 May 2015 High-efficiency bispectral laser for EUV
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Abstract
The results of experimental and theoretical modeling of multistage Raman conversion in compressed hydrogen with a buffer gas under using the lasing of neodymium-crystalline mediums to obtain the seed radiation for CO2 power amplifier in the double-pulse and bispectral primary laser while maintaining efficiency of LPP EUV source are presented. This scheme allows as significantly decrease level of pumping consumption and tune a delay time up to 820 ns between a weak power (initiating a plasma cloud) and main power pulses irradiated the converter target. The lasing intensity in the focal spots was 0.2 GW/cm2 and 5TW/cm2 respectively for wavelengths of 1.064 μm and 9.2 μm.
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A. P. Zhevlakov, A. P. Zhevlakov, R. P. Seisyan, R. P. Seisyan, V. G. Bespalov, V. G. Bespalov, V. V. Elizarov, V. V. Elizarov, A. S. Grishkanich, A. S. Grishkanich, S. V. Kascheev, S. V. Kascheev, } "High-efficiency bispectral laser for EUV", Proc. SPIE 9512, Advances in X-ray Free-Electron Lasers Instrumentation III, 95121W (12 May 2015); doi: 10.1117/12.2185192; https://doi.org/10.1117/12.2185192
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