PROCEEDINGS VOLUME 9517
SPIE MICROTECHNOLOGIES | 4-6 MAY 2015
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Proceedings Volume 9517 is from: Logo
SPIE MICROTECHNOLOGIES
4-6 May 2015
Barcelona, Spain
Front Matter: Volume 9517
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951701 (1 July 2015); doi: 10.1117/12.2199472
Harvesting
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951703 (21 May 2015); doi: 10.1117/12.2179783
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951704 (21 May 2015); doi: 10.1117/12.2179468
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951705 (21 May 2015); doi: 10.1117/12.2180143
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951706 (21 May 2015); doi: 10.1117/12.2179574
Materials and Processes
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951707 (21 May 2015); doi: 10.1117/12.2179442
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951708 (21 May 2015); doi: 10.1117/12.2178920
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951709 (21 May 2015); doi: 10.1117/12.2178598
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170A (21 May 2015); doi: 10.1117/12.2178612
Resonators
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170B (21 May 2015); doi: 10.1117/12.2180151
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170C (21 May 2015); doi: 10.1117/12.2179251
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170F (21 May 2015); doi: 10.1117/12.2178810
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170H (21 May 2015); doi: 10.1117/12.2181071
Optical Devices
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170I (21 May 2015); doi: 10.1117/12.2179059
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170J (21 May 2015); doi: 10.1117/12.2181241
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170K (21 May 2015); doi: 10.1117/12.2178867
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170L (21 May 2015); doi: 10.1117/12.2178866
Modeling
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170M (21 May 2015); doi: 10.1117/12.2179888
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170N (21 May 2015); doi: 10.1117/12.2178473
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170O (21 May 2015); doi: 10.1117/12.2180953
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170P (21 May 2015); doi: 10.1117/12.2178877
Devices
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170Q (21 May 2015); doi: 10.1117/12.2178763
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170R (15 June 2015); doi: 10.1117/12.2180864
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170S (21 May 2015); doi: 10.1117/12.2179867
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170T (21 May 2015); doi: 10.1117/12.2176188
Characterization
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (21 May 2015); doi: 10.1117/12.2179455
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170W (21 May 2015); doi: 10.1117/12.2179022
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170X (21 May 2015); doi: 10.1117/12.2178712
Systems
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170Y (21 May 2015); doi: 10.1117/12.2178914
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170Z (1 June 2015); doi: 10.1117/12.2178726
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951710 (21 May 2015); doi: 10.1117/12.2179049
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951712 (21 May 2015); doi: 10.1117/12.2178250
Chemical Sensors
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951713 (21 May 2015); doi: 10.1117/12.2179235
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951714 (21 May 2015); doi: 10.1117/12.2178976
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951715 (21 May 2015); doi: 10.1117/12.2179157
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951716 (21 May 2015); doi: 10.1117/12.2178260
Poster Session
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951718 (21 May 2015); doi: 10.1117/12.2179479
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951719 (21 May 2015); doi: 10.1117/12.2178850
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171A (21 May 2015); doi: 10.1117/12.2177798
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171C (21 May 2015); doi: 10.1117/12.2178503
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171E (21 May 2015); doi: 10.1117/12.2179156
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171F (21 May 2015); doi: 10.1117/12.2178138
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171G (21 May 2015); doi: 10.1117/12.2178333
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171H (21 May 2015); doi: 10.1117/12.2178448
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171I (21 May 2015); doi: 10.1117/12.2179126
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171J (21 May 2015); doi: 10.1117/12.2179493
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171K (21 May 2015); doi: 10.1117/12.2177797
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171L (21 May 2015); doi: 10.1117/12.2180898
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171M (21 May 2015); doi: 10.1117/12.2178609
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171N (21 May 2015); doi: 10.1117/12.2178773
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171O (21 May 2015); doi: 10.1117/12.2178821
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171P (21 May 2015); doi: 10.1117/12.2179341
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171Q (21 May 2015); doi: 10.1117/12.2178719
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171R (21 May 2015); doi: 10.1117/12.2178765
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171S (21 May 2015); doi: 10.1117/12.2178963
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171T (21 May 2015); doi: 10.1117/12.2177669
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171U (21 May 2015); doi: 10.1117/12.2179684
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171V (21 May 2015); doi: 10.1117/12.2179751
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171W (21 May 2015); doi: 10.1117/12.2179970
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171X (21 May 2015); doi: 10.1117/12.2180117
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171Y (21 May 2015); doi: 10.1117/12.2180573
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171Z (21 May 2015); doi: 10.1117/12.2180923
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951720 (21 May 2015); doi: 10.1117/12.2178812
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951721 (21 May 2015); doi: 10.1117/12.2179041
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951722 (21 May 2015); doi: 10.1117/12.2182563
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951723 (21 May 2015); doi: 10.1117/12.2179866
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951724 (21 May 2015); doi: 10.1117/12.2180135
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951725 (21 May 2015); doi: 10.1117/12.2181202
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951727 (21 May 2015); doi: 10.1117/12.2178490
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951728 (21 May 2015); doi: 10.1117/12.2178657
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951729 (1 June 2015); doi: 10.1117/12.2184807
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172A (21 May 2015); doi: 10.1117/12.2188217
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172B (21 May 2015); doi: 10.1117/12.2188231
Energy Harvesting and Low Power Design
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172C (21 May 2015); doi: 10.1117/12.2178782
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172D (21 May 2015); doi: 10.1117/12.2178860
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172E (21 May 2015); doi: 10.1117/12.2179595
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172F (21 May 2015); doi: 10.1117/12.2181209
Embedded Systems Applications
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172G (21 May 2015); doi: 10.1117/12.2179759
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172H (21 May 2015); doi: 10.1117/12.2180878
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172I (21 May 2015); doi: 10.1117/12.2181332
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172J (21 May 2015); doi: 10.1117/12.2181339
Networking and Embedded Computing
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172K (21 May 2015); doi: 10.1117/12.2178856
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172L (21 May 2015); doi: 10.1117/12.2179288
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95172M (21 May 2015); doi: 10.1117/12.2179019
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