Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

Hutomo Suryo Wasisto; Wenze Wu; Erik Uhde; Andreas Waag; Erwin Peiner

doi:10.1117/12.2180151

21 May 2015 Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

Hutomo Suryo Wasisto, Wenze Wu, Erik Uhde, Andreas Waag, Erwin Peiner

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170B (2015) https://doi.org/10.1117/12.2180151
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8–14%.

Citation Download Citation

Hutomo Suryo Wasisto, Wenze Wu, Erik Uhde, Andreas Waag, and Erwin Peiner "Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170B (21 May 2015); https://doi.org/10.1117/12.2180151

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