21 May 2015 Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure
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Abstract
Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8–14%.
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Hutomo Suryo Wasisto, Hutomo Suryo Wasisto, Wenze Wu, Wenze Wu, Erik Uhde, Erik Uhde, Andreas Waag, Andreas Waag, Erwin Peiner, Erwin Peiner, } "Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170B (21 May 2015); doi: 10.1117/12.2180151; https://doi.org/10.1117/12.2180151
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