21 May 2015 The next generation of MEMS-based optical microspectrometers
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MEMS-based optical microspectrometers are typically composed of MEMS devices for operation as dispersive element or as tunable resonator within an optical system. CMOS-compatible MEMS technologies enable on-chip integration of the MEMS optical components, detector and readout circuits. The actual realization and exploitation of this on-chip functional integration of the entire microspectrometer imposes several challenges. The state-of-the-art and some of the technology and design challenges will be outlined, followed by an introduction to some of the trends and upcoming application of high potential.
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Reinoud F. Wolffenbuttel, Reinoud F. Wolffenbuttel, "The next generation of MEMS-based optical microspectrometers", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170I (21 May 2015); doi: 10.1117/12.2179059; https://doi.org/10.1117/12.2179059

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