Smart sensors and calibration standards for high precision metrology

Uwe Brand; Sai Gao; Lutz Doering; Zhi Li; Min Xu; Sebastian Buetefisch; Erwin Peiner; Joachim Fruehauf; Karla Hiller

doi:10.1117/12.2179455

21 May 2015 Smart sensors and calibration standards for high precision metrology

Uwe Brand, Sai Gao, Lutz Doering, Zhi Li, Min Xu, Sebastian Buetefisch, Erwin Peiner, Joachim Fruehauf, Karla Hiller

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170V (2015) https://doi.org/10.1117/12.2179455
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

The paper summarize the PTB activities in the field of silicon sensors for dimensional metrology especially roughness measurements and silicon calibration standards developed during the past ten years. A focus lies in the development of 2D silicon microprobes which enable roughness measurements in nozzles as small as 100 μm in diameter. Moreover these microprobes offer the potential for very fast tactile measurements up to 15 mm/s due to their tiny mass and therefore small dynamic forces. When developing high precision tactile sensors care has to be taken, not to scratch the often soft surfaces. Small probing forces and well defined tip radii have to be used to avoid surface destruction. Thus probing force metrology and methods to determine the radius and form of probing tips have been developed. Silicon is the preferred material for the calibration of topography measuring instruments due to its excellent mechanical and thermal stability and due to the fabrication and structuring possibilities of silicon microtechnology. Depth setting standards, probing force setting standards, tip radius and tip form standards, reference springs and soft material testing artefacts will be presented.

Citation Download Citation

Uwe Brand, Sai Gao, Lutz Doering, Zhi Li, Min Xu, Sebastian Buetefisch, Erwin Peiner, Joachim Fruehauf, and Karla Hiller "Smart sensors and calibration standards for high precision metrology", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (21 May 2015); https://doi.org/10.1117/12.2179455

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