Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer

Ch. Taudt; A. Augenstein; T. Baselt; H. Assmann; A. Greiner; E. Koch; P. Hartmann

doi:10.1117/12.2179022

21 May 2015 Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer

Ch. Taudt, A. Augenstein, T. Baselt, H. Assmann, A. Greiner, E. Koch, P. Hartmann

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170W (2015) https://doi.org/10.1117/12.2179022
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

In this paper an alternative approach to surface profilometry based on a combined time-spectral domain white-light interferometer is shown. Within the setup a reference interferometer arm contains of a fixed mirror and a material with known dispersion while the object arm is aligned to a sample e.g. a wafer surface. Under the usage of a translation stage different height profiles in the nm - regime are emulated and measured accordingly with the interferometer. The signal analysis and calculation of interesting parameters is performed by a fitting algorithm. This algorithm is based on theoretical considerations on a dispersion affected interferometer which are also shown in the work. The experimental configuration allows a measurement range of 12 μm while a theoretical average resolution of 28 nm is possible. In the results it is observable that the measurement of height changes on a surface with an RMS error of 18 nm at the maximum is possible. In conclusion sources of error and further improvement possibilities are discussed.

Citation Download Citation

Ch. Taudt, A. Augenstein, T. Baselt, H. Assmann, A. Greiner, E. Koch, and P. Hartmann "Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170W (21 May 2015); https://doi.org/10.1117/12.2179022

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