Novel SH-SAW gas sensor based on graphene

I. Nikolaou; H. Hallil; G. Deligeorgis; V. Conedera; H. Garcia; C. Dejous; D. Rebière

doi:10.1117/12.2178260

21 May 2015 Novel SH-SAW gas sensor based on graphene

I. Nikolaou, H. Hallil, G. Deligeorgis, V. Conedera, H. Garcia, C. Dejous, D. Rebière

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 951716 (2015) https://doi.org/10.1117/12.2178260
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

In this article, a novel gas sensor platform has been studied. Several layers of graphene have been deposited on a SH-SAW, as a sensitive layer. Innovative methods of graphene solutions have been prepared in order to explore gas sensing applications. The real time detection measurement of the coated sensor under ethanol and humidity is presented. The adsorption of vapors leads to a frequency shift of 10.5 kHz and 22.7 kHz, at exposure of 100 ppm of ethanol and 6.22% of Relative Humidity, respectively. The experiments have been realized at room temperature; rapid response and recovery time were observed.

Citation Download Citation

I. Nikolaou, H. Hallil, G. Deligeorgis, V. Conedera, H. Garcia, C. Dejous, and D. Rebière "Novel SH-SAW gas sensor based on graphene", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951716 (21 May 2015); https://doi.org/10.1117/12.2178260

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