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21 May 2015 Research and development of capacitive transducer with linear acceleration
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Paper presents the study results and modeling of functional characteristics of the linear acceleration transducers, enabling sensors creation with the specified parameters. Sensing element made for linear acceleration transducer with torsion cruciform section has been proposed on the based design and technological principles. It allows minimizing the impact of cross-acceleration and gives the maximum of center mass displacement for high sensors sensitivity in the given dimensions. The range of measured acceleration from ± 0.2g to ± 50g was provided by changing the torsion bar thickness n = 34 ÷ 56 microns. The transducers frequency range of linear acceleration 100-150 Hz depends on the gas pressure P = 700-800Pa in which the sensor element was located. Methods converting displacement of sensing element in the sensor output have been provided. On their basis the linear acceleration transducers with analog output signal having a predetermined frequency range and high linearity of the transformation (nonlinearity 0.2-1.5%) was developed. Also the linear acceleration transducers with digital signal consuming little (no more than 850 μA), low noisy (standard deviation to 0.1mg/rt-Hz) and high sensitivity (up to 0.1mg) to the accelerations was made. Errors in manufacturing process of sensitive elements and operating environment temperature affect the changes in the characteristics of the linear acceleration transducers. It has been established that different plate thickness up to 3.6% leads to the scale factor error to 4.7%. Irreproducibility of depth anisotropic etching of silicon up to 6.6% introduces an error in the output signal of 2.9 ... 13.8mg.
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Natalia Korobova, Elena Kochurina, Sergey Timoshenkov, Yuriy Chaplygin, Stepan Anchutin, and Andrey Kosolapov "Research and development of capacitive transducer with linear acceleration", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951725 (21 May 2015);

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