Fabrication of parylene channels embedded in silicon using a single parylene deposition step

Elena Tolstosheeva; João Vitor Pimentel; Andreas Schander; Ludger Kempen; Michael Vellekoop; Walter Lang

doi:10.1117/12.2179780

1 June 2015 Fabrication of parylene channels embedded in silicon using a single parylene deposition step

Elena Tolstosheeva, João Vitor Pimentel, Andreas Schander, Ludger Kempen, Michael Vellekoop, Walter Lang

Proceedings Volume 9518, Bio-MEMS and Medical Microdevices II; 951811 (2015) https://doi.org/10.1117/12.2179780
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

In-situ integration of microfluidic channels into the microfabrication process flow of implantable microsystems is desirable, for example to enable efficient drug delivery. We propose a fabrication method for such microfluidic channels using parylene C, a biocompatible material whose inert nature favours water flow. A single deposition of parylene C enabled monolithical integration of fully-sealed micro-channels in a silicon substrate. The channel geometry was predefined by etching 100 μm-deep grooves into a silicon substrate. A PVC foil was fixed manually on the wafer and served as a top-cover for the grooves. The wafers were coated with the adhesion promoter AdPro Poly® and a 15 μm-thick parylene C film was deposited conformally into the grooves-foil enclosed space. The outgasing nature of the PVC foil hindered the adhesion of parylene C, allowing the foil to be peeled off easily from the parylene surface. The functionality of the fully-sealed parylene channels, embedded in the silicon wafer, was verified by injecting DI water with dispersed polystyrene microbeads (diameter 6 μm): the polystyrene beads were successfully transported along the channel. Further, a fully-sealed parylene chamber remained leak-tight throughout a stepwise application of hydrostatic pressures from 0.2 to 3.0 bar (15 s step-interval). In short, our parylene channels are: (1) suitable for microsystem drug-delivery; (2) in-situ enclosed hollow spaces embedded in the silicon substrate, realized with a single parylene deposition; (3) intact at hydrostatic pressures up to 3 bar.

Citation Download Citation

Elena Tolstosheeva, João Vitor Pimentel, Andreas Schander, Ludger Kempen, Michael Vellekoop, and Walter Lang "Fabrication of parylene channels embedded in silicon using a single parylene deposition step", Proc. SPIE 9518, Bio-MEMS and Medical Microdevices II, 951811 (1 June 2015); https://doi.org/10.1117/12.2179780

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KEYWORDS

Silicon

Semiconducting wafers

Microfluidics

Microsystems

Glasses

Photoresist materials

Scanning electron microscopy

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