1 June 2015 Towards AlN optical cladding layers for thermal management in hybrid lasers
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Aluminium Nitride (AlN) is proposed as a dual function optical cladding and thermal spreading layer for hybrid ridge lasers, replacing current benzocyclobutene (BCB) encapsulation. A high thermal conductivity material placed in intimate contact with the Multi-Quantum Well active region of the laser allows rapid heat removal at source but places a number of constraints on material selection. AlN is considered the most suitable due to its high thermal conductivity when deposited at low deposition temperatures, similar co-efficient of thermal expansion to InP, its suitable refractive index and its dielectric nature. We have previously simulated the possible reduction in the thermal resistance of a hybrid ridge laser by replacing the BCB cladding material with a material of higher thermal conductivity of up to 319 W/mK. Towards this goal, we demonstrate AlN thin-films deposited by reactive DC magnetron sputtering on InP.
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Ian Mathews, Ian Mathews, Shenghui Lei, Shenghui Lei, Kevin Nolan, Kevin Nolan, Guillaume Levaufre, Guillaume Levaufre, Alexandre Shen, Alexandre Shen, Guang-Hua Duan, Guang-Hua Duan, Brian Corbett, Brian Corbett, Ryan Enright, Ryan Enright, "Towards AlN optical cladding layers for thermal management in hybrid lasers", Proc. SPIE 9520, Integrated Photonics: Materials, Devices, and Applications III, 95200J (1 June 2015); doi: 10.1117/12.2178924; https://doi.org/10.1117/12.2178924

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