4 March 2015 Influence by x-ray facula on dimension measurement
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Proceedings Volume 9521, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I; 95210T (2015) https://doi.org/10.1117/12.2175486
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held August-October 2014, 2014, China, China
Abstract
Based on the imaging features of the original image intensifier of X-ray, the light halo caused by X-ray projective halation is analyzed, the result shows the stray X-ray energy is lower than the direct X-ray energy. The screen brightness generated by the image intensifier of X-ray stimulated by the stray X-ray energy is weaker than that generated by the direct X-ray energy. In addition the projector facula reflected from the direct X-ray is focused on the central region of X-ray image intensifier, therefore a toroidal ring similar to the solar halation is formed around the projector halation. The results of the theoretical analysis and experimental discovery show this phenomenon caused by X-ray tube on X-ray image intensifier can not be eliminated and in the system of X-ray size detection composed of them the X-ray halation will reduce the detection accuracy resulting in measurement results’ deviation dispersion under given conditions. This kind of nonlinear system error can not be canceled out by the segmented modification of coefficient compensation but it can be restrained through the adjustment of correction coefficients. After the physical testing and comparison of the physical normal size the accuracy of 0.1mm of the compensated X-ray measurement results after the adjustment of correction coefficient has been reached. The results are highly reproducible and the method of the segmented coefficient compensation has been improved.
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Xulei Qin, Xulei Qin, Ye Li, Ye Li, Qingduo Duanmu, Qingduo Duanmu, Peng Zhao, Peng Zhao, } "Influence by x-ray facula on dimension measurement", Proc. SPIE 9521, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part I, 95210T (4 March 2015); doi: 10.1117/12.2175486; https://doi.org/10.1117/12.2175486
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