13 April 2015 Study of a sensor based on the series of micro-rings with dual coupling points
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Proceedings Volume 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II; 95220P (2015) https://doi.org/10.1117/12.2179267
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held August-October 2014, 2014, China, China
Abstract
A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.
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Xin Li, Xin Li, Shiliang Guo, Shiliang Guo, Ruiqi Piao, Ruiqi Piao, Ming Yang, Ming Yang, } "Study of a sensor based on the series of micro-rings with dual coupling points", Proc. SPIE 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II, 95220P (13 April 2015); doi: 10.1117/12.2179267; https://doi.org/10.1117/12.2179267
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