23 July 2015 Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement
Author Affiliations +
Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 952416 (2015) https://doi.org/10.1117/12.2189286
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore
Abstract
In this paper, we propose a real-time solution based on multi-point diffraction-based interferometer that is capable of 2-dimensional full-field, in-plane strain measurement and analysis with micrometric sensitivity and accuracy. We discuss the various techniques used to provide real-time dynamic analysis of strain over space and time so as to highlight trends of potential in-situ stress build-up over a device.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wing Onn Koh, Wing Onn Koh, Hui Zhu, Hui Zhu, } "Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952416 (23 July 2015); doi: 10.1117/12.2189286; https://doi.org/10.1117/12.2189286
PROCEEDINGS
10 PAGES


SHARE
RELATED CONTENT

Fill factor improvement using microlens arrays
Proceedings of SPIE (March 14 1998)
A practical system for x-ray interferometry
Proceedings of SPIE (October 10 2004)
Application of SLMs for optical metrology
Proceedings of SPIE (November 07 2001)
Active wavefront sensing and wavefront control with SLMs
Proceedings of SPIE (August 01 2004)
Design framework for a spectral mask for a plenoptic camera
Proceedings of SPIE (January 24 2012)

Back to Top