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23 July 2015 Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement
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Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 952416 (2015) https://doi.org/10.1117/12.2189286
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore
Abstract
In this paper, we propose a real-time solution based on multi-point diffraction-based interferometer that is capable of 2-dimensional full-field, in-plane strain measurement and analysis with micrometric sensitivity and accuracy. We discuss the various techniques used to provide real-time dynamic analysis of strain over space and time so as to highlight trends of potential in-situ stress build-up over a device.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wing Onn Koh and Hui Zhu "Real-time multi-point diffraction-based imaging system (ReMuDis) for strain measurement", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952416 (23 July 2015); https://doi.org/10.1117/12.2189286
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