For high-functional optical films composed of micro patterns, the optical properties, such as the diffraction, reflection and diffusion, depend on the pattern size, shape, and arrangement. For this reason, a high precision machining process and the technology of pattern design were studied in order to increase function and efficiency. The basic shapes of micro patterns are often prisms, square pyramids and triangular pyramids. Generally, a prism pattern on a flat surface can be continuously grooved by a diamond tool same as a shape angle of the pattern. The square pyramid shape is perpendicularly machined on the prism pattern. The triangular pyramid is made with a bisection of the square pyramid along the diagonal direction. Thus, optical properties can be changed according to prism patterns produced by mechanical machining. In this paper, prism, square pyramid and triangular pyramid pattern molds were machined, and optical properties of the respective shapes were compared. The machining experiment employed an ultra-precision 4-axis planer, V-shape diamond tools, and Cu-plating molds. The machined micro patterns were replicated using UV-resin; then light-transmission measurements were performed to confirm the optical properties of the mold pattern.