Study on formation mechanism of periodic ripple on finished KDP crystal in cutting process

Guipeng Tie; Chaoliang Guan

doi:10.1117/12.2189587

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23 July 2015 Study on formation mechanism of periodic ripple on finished KDP crystal in cutting process

Guipeng Tie, Chaoliang Guan

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Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 95241V (2015) https://doi.org/10.1117/12.2189587
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore

Abstract

A kind of formation mechanism of periodic ripple on finished KDP (potassium dihydrogen phosphate) crystal in cutting process is studied by analyzing the change of equivalent axial stiffness of aerostatic spindle and consequent motion of spindle shaft caused by fluctuation of supply air pressure. The analysis shows that fluctuation of supply air pressure is one of the reasons to cause surface ripple. Correlative experiments are taken and validate the analysis. By strictly controlling air pressure fluctuation, the Peak-to-Valley (PV) value of surface ripple generated by both spiral turning and face flycutting processes are reduced to less than 5nm.

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Guipeng Tie and Chaoliang Guan "Study on formation mechanism of periodic ripple on finished KDP crystal in cutting process", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95241V (23 July 2015); https://doi.org/10.1117/12.2189587

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