Spatial-frequency analysis algorithm for in-situ measurement of wavefront

Qian Liu; Yang Wang; Fang Ji; Jianguo He

doi:10.1117/12.2184769

22 June 2015 Spatial-frequency analysis algorithm for in-situ measurement of wavefront

Qian Liu, Yang Wang, Fang Ji, Jianguo He

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95250B (2015) https://doi.org/10.1117/12.2184769
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

To apply phase-shifting interferometry (PSI) to in-situ measurement, we have proposed an algorithm to detect and suppress phase-shifting error and contrast fluctuation. The phase shift and contrast are analyzed in spatial-frequency domain. The strength of baseband and sideband implies the pattern contrast. The position and phase angle of the sideband indicates the tilt gradients and translational value of phase shift. Thus, the phase shift error and contrast fluctuation could be extracted. A contrast-compensated equation is established to calculate the wavefront phase. The proposed algorithm was applied to the interferograms subjecting to vibration and wavefront phase was calculated. The experimental results show that, under vibration of one micron amplitude and 60Hz frequency, the error of wavefront PV value is less than 0.01wave and the 2σ repeatability is less than 0.01wave. For no hardware is required, the proposed algorithm provides a cost-effective method for wavefront in-situ measurement with PSI.

Citation Download Citation

Qian Liu, Yang Wang, Fang Ji, and Jianguo He "Spatial-frequency analysis algorithm for in-situ measurement of wavefront", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95250B (22 June 2015); https://doi.org/10.1117/12.2184769

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KEYWORDS

Phase shifts

Wavefronts

Mirrors

Error analysis

Phase shifting

Detection and tracking algorithms

Photovoltaics

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