A calibration method of self-referencing interferometry based on maximum likelihood estimation

Chen Zhang; Dahai Li; Mengyang Li; Kewei E; Guangrao Guo

doi:10.1117/12.2184591

22 June 2015 A calibration method of self-referencing interferometry based on maximum likelihood estimation

Chen Zhang, Dahai Li, Mengyang Li, Kewei E, Guangrao Guo

Author Affiliations +

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95250X (2015) https://doi.org/10.1117/12.2184591
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Self-referencing interferometry has been widely used in wavefront sensing. However, currently the results of wavefront measurement include two parts, one is the real phase information of wavefront under test and the other is the system error in self-referencing interferometer. In this paper, a method based on maximum likelihood estimation is presented to calibrate the system error in self-referencing interferometer. Firstly, at least three phase difference distributions are obtained by three position measurements of the tested component: one basic position, one rotation and one lateral translation. Then, combining the three phase difference data and using the maximum likelihood method to create a maximum likelihood function, reconstructing the wavefront under test and the system errors by least square estimation and Zernike polynomials. The simulation results show that the proposed method can deal with the issue of calibration of a self-referencing interferometer. The method can be used to reduce the effect of system errors on extracting and reconstructing the wavefront under test, and improve the measurement accuracy of the self-referencing interferometer.

Citation Download Citation

Chen Zhang, Dahai Li, Mengyang Li, Kewei E, and Guangrao Guo "A calibration method of self-referencing interferometry based on maximum likelihood estimation ", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95250X (22 June 2015); https://doi.org/10.1117/12.2184591

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KEYWORDS

Wavefronts

Interferometry

Interferometers

Calibration

Error analysis

Zernike polynomials

Shearing interferometers

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