Paper
22 June 2015 Calibration of z-axis linearity for arbitrary optical topography measuring instruments
Matthias Eifler, Jörg Seewig, Julian Hering, Georg von Freymann
Author Affiliations +
Abstract
The calibration of the height axis of optical topography measurement instruments is essential for reliable topography measurements. A state of the art technology for the calibration of the linearity and amplification of the z-axis is the use of step height artefacts. However, a proper calibration requires numerous step heights at different positions within the measurement range. The procedure is extensive and uses artificial surface structures that are not related to real measurement tasks.

Concerning these limitations, approaches should to be developed that work for arbitrary topography measurement devices and require little effort. Hence, we propose calibration artefacts which are based on the 3D-Abbott-Curve and image desired surface characteristics. Further, real geometric structures are used as an initial point of the calibration artefact.

Based on these considerations, an algorithm is introduced which transforms an arbitrary measured surface into a measurement artefact for the z-axis linearity. The method works both for profiles and topographies. For considering effects of manufacturing, measuring, and evaluation an iterative approach is chosen. The mathematical impact of these processes can be calculated with morphological signal processing.

The artefact is manufactured with 3D laser lithography and characterized with different optical measurement devices. An introduced calibration routine can calibrate the entire z-axis-range within one measurement and minimizes the required effort. With the results it is possible to locate potential linearity deviations and to adjust the z-axis. Results of different optical measurement principles are compared in order to evaluate the capabilities of the new artefact.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthias Eifler, Jörg Seewig, Julian Hering, and Georg von Freymann "Calibration of z-axis linearity for arbitrary optical topography measuring instruments", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952510 (22 June 2015); https://doi.org/10.1117/12.2190737
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Calibration

Manufacturing

Measurement devices

Chromium

Optical testing

Signal processing

Curium

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