Overview of characterization and metrology techniques for microlenses and microlens arrays

Myun-Sik Kim; Lisa Allegre; Jonathan Sunarjo; Wilfried Noell; Reinhard Voelkel

doi:10.1117/12.2183692

22 June 2015 Overview of characterization and metrology techniques for microlenses and microlens arrays

Myun-Sik Kim, Lisa Allegre, Jonathan Sunarjo, Wilfried Noell, Reinhard Voelkel

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95251D (2015) https://doi.org/10.1117/12.2183692
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We review various metrology techniques for the characterization of refractive microlenses and microlens arrays (MLAs). The limitations and strength of each technique are analyzed. The goal is to obtain more stable and repeatable metrology routines for micro-optics manufacturing. This analysis comprises both techniques for the characterization of individual microlenses and the analysis of a very large number of microlenses in array configurations. Metrology of spherical and aspherical lens profiles, surface properties, aberrations, Strehl ratio, and focal properties will be presented.

Citation Download Citation

Myun-Sik Kim, Lisa Allegre, Jonathan Sunarjo, Wilfried Noell, and Reinhard Voelkel "Overview of characterization and metrology techniques for microlenses and microlens arrays", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251D (22 June 2015); https://doi.org/10.1117/12.2183692

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available