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22 June 2015 Overview of characterization and metrology techniques for microlenses and microlens arrays
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Abstract
We review various metrology techniques for the characterization of refractive microlenses and microlens arrays (MLAs). The limitations and strength of each technique are analyzed. The goal is to obtain more stable and repeatable metrology routines for micro-optics manufacturing. This analysis comprises both techniques for the characterization of individual microlenses and the analysis of a very large number of microlenses in array configurations. Metrology of spherical and aspherical lens profiles, surface properties, aberrations, Strehl ratio, and focal properties will be presented.
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Myun-Sik Kim, Lisa Allegre, Jonathan Sunarjo, Wilfried Noell, and Reinhard Voelkel "Overview of characterization and metrology techniques for microlenses and microlens arrays", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251D (22 June 2015); https://doi.org/10.1117/12.2183692
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