22 June 2015 Overview of characterization and metrology techniques for microlenses and microlens arrays
Author Affiliations +
Abstract
We review various metrology techniques for the characterization of refractive microlenses and microlens arrays (MLAs). The limitations and strength of each technique are analyzed. The goal is to obtain more stable and repeatable metrology routines for micro-optics manufacturing. This analysis comprises both techniques for the characterization of individual microlenses and the analysis of a very large number of microlenses in array configurations. Metrology of spherical and aspherical lens profiles, surface properties, aberrations, Strehl ratio, and focal properties will be presented.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Myun-Sik Kim, Myun-Sik Kim, Lisa Allegre, Lisa Allegre, Jonathan Sunarjo, Jonathan Sunarjo, Wilfried Noell, Wilfried Noell, Reinhard Voelkel, Reinhard Voelkel, } "Overview of characterization and metrology techniques for microlenses and microlens arrays", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251D (22 June 2015); doi: 10.1117/12.2183692; https://doi.org/10.1117/12.2183692
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT


Back to Top