In this paper we want to present a new approach for shape metrology of parts, fabricated in small lots: the individualized optical metrology based on additive manufacturing. Thereby the main idea is that the sampling signal of an optical metrology tool is individually adapted to the shape of the object to be inspected. This can be reached by an individual design of the optics, leading to a complex shape of the optical components. In order to manufacture these complex shaped optical parts, additive manufacturing (3D printing) is used.
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A. Heinrich, P. Maillard, A. Suckow, A. Grzesiak, P. Sorg, U. Berger, "Additive manufacturing: a new approach for individualized optical shape metrology," Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251T (22 June 2015);