22 June 2015 Precision inspection of micro-components flatness by Moiré interferometry
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Abstract
The technique proposed in this paper provides a quality control components surface flatness by non-destructive and contactless way, with high resolution and increased sensitivity. The control is done in real time and instantaneously on all inspected surface. The technique has found various applications in diverse fields, from biomedical to industrial and scientific applications. In many industrial metrology applications, contactless and non-destructive shape measurement is a desirable tool for, quality control and contour mapping. This method of optical scanning presented in this paper is used for precision measurement deformation in shape or absolute forms in comparison with a reference component form, of optical or mechanical components, on surfaces that are of the order of few mm2 and more. The principle of the method is to project the image of the source grating to palpate optically surface to be inspected, after reflection; the image of the source grating is printed by the object topography and is then projected onto the plane of reference grating for generate moiré fringe for defects detection. The optical device used allows a significant dimensional surface magnification of the area inspected for micro-surfaces, which allows easy processing and reaches an exceptional nanometric imprecision of measurements. According to the measurement principle, the sensitivity for displacement measurement using moiré technique depends on the frequency grating, for increase the detection resolution
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S. Meguellati, S. Meguellati, } "Precision inspection of micro-components flatness by Moiré interferometry", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95252L (22 June 2015); doi: 10.1117/12.2184119; https://doi.org/10.1117/12.2184119
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