Investigation on measurement of mid-frequency wavefront error for large optics in high-power laser system

Shijie Liu; Chunxiang Jin; You Zhou; Yunbo Bai; Yuanan Zhao; Kui Yi; Jianda Shao

doi:10.1117/12.2184586

22 June 2015 Investigation on measurement of mid-frequency wavefront error for large optics in high-power laser system

Shijie Liu, Chunxiang Jin, You Zhou, Yunbo Bai, Yuanan Zhao, Kui Yi, Jianda Shao

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 952536 (2015) https://doi.org/10.1117/12.2184586
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

In this paper, we extended the measurement method of mid-frequency wavefront error to spherical and aspherical components. Some influence factors like the system error of interferometer, environment variation, surface parallelism of optics, polarizations of interferometer illumination, and the wavefront distribution of optics are analyzed in detail. Some optimized measurement strategies for different kinds of optics are suggested. Finally, experimental measurements on flat optics, spherical and aspherical optics are performed to testify the suggested measurement methods, respectively.

Citation Download Citation

Shijie Liu, Chunxiang Jin, You Zhou, Yunbo Bai, Yuanan Zhao, Kui Yi, and Jianda Shao "Investigation on measurement of mid-frequency wavefront error for large optics in high-power laser system", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952536 (22 June 2015); https://doi.org/10.1117/12.2184586

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