Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer

Risto Montonen; Ivan Kassamakov; Edward Hæggström; Kenneth Österberg

doi:10.1117/12.2184715

22 June 2015 Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer

Risto Montonen, Ivan Kassamakov, Edward Hæggström, Kenneth Österberg

Author Affiliations +

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95253L (2015) https://doi.org/10.1117/12.2184715
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

The internal shape and alignment of accelerator discs is crucial for efficient collider operation in the possible future compact linear collider. We applied a custom made and calibrated Fourier domain short coherence interferometer to measure the height of 40 and 60 μm machined steps on a copper disc in our laboratory. The step heights were determined to be: (43.0 ± 3.1) μm and (46.5 ± 3.2) μm for the 40 μm nominal step, and (46.6 ± 3.6) μm for the 60 μm nominal step. The errors represent 95% confidence level uncertainties and include uncertainty contributions from the calibration, refractive index of air, cosine error, and surface roughness. The step heights were validated by a calibrated contact stylus profilometer which resulted into (44.5 ± 0.8) μm and (45.9 ± 1.0) μm for the 40 μm nominal step, and (45.5 ± 1.7) μm for the 60 μm nominal step at 95% confidence level. The results show feasibility for noncontacting absolute shape and step height characterization with micrometer-level accuracy. This instrument is a first step towards a quality assurance tester for the accelerating structures of the compact linear collider.

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Risto Montonen, Risto Montonen, Ivan Kassamakov, Ivan Kassamakov, Edward Hæggström, Edward Hæggström, Kenneth Österberg, Kenneth Österberg, } "Quantifying height of machined steps on copper disk using Fourier domain short coherence interferometer", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95253L (22 June 2015); doi: 10.1117/12.2184715; https://doi.org/10.1117/12.2184715

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