22 June 2015 The choice of marks for systems with noncontact position control
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Abstract
High precision optical contactless position measurements are a key technology in modern industrial inspection. The characteristics of the different types of retroreflective materials and devices, require specialized designs of optical systems to precisely measure their properties. Various instruments are available to measure the retroreflective characteristics rather in the laboratory or under real conditions. Main parameters, such as aperture angles and the tolerances on observation angle and entrance pupil must be considered when designing such systems or large inaccuracies will occur. This paper presents results of the theoretical and experimental analysis of the errors of autoreflection schemes for alignment control based on corner-cube retroreflectors, which investigated the influence of the most significant factors.
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Valery V. Korotaev, Valery V. Korotaev, Maksim A. Kleshchenok, Maksim A. Kleshchenok, } "The choice of marks for systems with noncontact position control", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95253T (22 June 2015); doi: 10.1117/12.2184775; https://doi.org/10.1117/12.2184775
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