21 June 2015 Front Matter: Volume 9526
This PDF file contains the front matter associated with SPIE Proceedings Volume 9526, including the Title Page, Copyright information, Table of Contents, Invited Panel Discussion, and Conference Committee listing.

Modeling Aspects in Optical Metrology V

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Volume 9526

The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

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Author(s), ‘Title of Paper,” in Modeling Aspects in Optical Metrology V, edited by Bernd Bodermann, Karsten Frenner, Richard M. Silver, Proceedings of SPIE Vol. 9526 (SPIE, Bellingham, WA, 2015) Article CID Number.

ISSN: 0277-786X

ISBN: 9781628416862

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Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Abbas, Mohammed, 0F

Abdula, Polina A., 1N

Agocs, E., 0S

Ahmadi, Mohammad, 1Q

Al-Hadhrami, Luai M., 0F

Ao, Ming-Wu, 0C, 13

Bär, Markus, 0U

Barnes, Bryan M., 0V

Bäumer, S., 0O

Beuth, Thorsten, 09, 0G

Beverage, Jake, 10

Bittkau, Karsten, 0W

Bodermann, Bernd, 0S, 0U

Bräuer-Burchardt, Christian, 08

Campos, Juan, 11, 16, 1A

Cao, Zhao, 0W

Carius, Reinhard, 0W

Casillas-Rodríguez, Francisco J., 12

Chelibanov, V. P., 0D

Chen, Xiuguo, 17, 19

Cisotto, L., 07

de Groot, Peter, 10

Deutz, A., 0O

Dong, Lizhi, 0C, 13

Endres, J., 0S

Ermes, Markus, 0W

Ershov, Alexandr G., 1B

Estévez, Irene, 16, 1A

Ezhova, Kseniia, 1E, 1I

Fodor, B., 0S

Fox, Maik, 09, 0G

Freijo Martín, Idoia, 0A

Frenner, Karsten, 0Z

Fried, M., 0S

Fries, T., 0R

Fu, Liwei, 0Z

Glebov, Victor, 1C

Gross, Hermann, 0U

Gruppetta, Stephen, 0X

Gu, Honggang, 17, 19

Heidenreich, Sebastian, 0U

Henn, Mark-Alexander, 0V

Holzhüter, Hanno, 0I

Houta, F., 0R

Huke, Philipp, 0I

Iemmi, Claudio, 11, 16

Ishanin, G. G., 0D

Javadianvarjovi, Soheila, 1Q

Jiang, Hao, 17, 19

Juhasz, G., 0S

Kalkanjiev, Todor K., 16

Khan, Mohammed Z. U., 0F

Konyakhin, Igor A., 0H, 1E, 1H

Kozma, P., 0S

Kraszewski, Maciej, 0M

Krauze, W., 0Y

Kühmstedt, Peter, 08

Kujawinska, M., 0Y

Kumar, N., 0S

Lashmanov, Oleg U., 1C

Leger, James R., 0Q

Lehnen, Stephan, 0W

Levin, Alexander D., 0P

Li, Lifeng, 05, 1G

Li, Weiqi, 17, 19

Lin, Di, 0Q

Liu, Shiyuan, 17, 19

Lizana, Angel, 16, 1A

Lohner, T., 0S

Madanipour, Khosro, 1Q

Major, C., 0S

Makowski, P., 0Y

Máquez, Andrés, 1A

Marshall, Richard J., 0X

Martínez, Jose Luis, 1A

Matsak, Ivan S., 0K

Meah, Chris J., 0X

Molev, Fedor, 1E

Mompart, Jordi, 16

Mora-González, Miguel, 12

Moreno, Ignacio, 1A

Mroczka, Janusz, 1F, 1L

Muñoz-Maciel, Jesús, 12

Muzychenko, Yana B, 1M

Nador, J., 0S

Neutov, Mikhail Y., 1N

Notni, Gunther, 08

Osten, Wolfgang, 0Z

Ostrowski, Mariusz, 1L

Peinado, Alba, 16, 1A

Peña-Lecona, Francisco G., 12

Peng, HeKuo, 0L

Pereira, S. F., 07, 0S

Petrik, P., 0S

Petrochenko, Andrew V., 1H

Pettazzi, F., 0O

Plachta, Kamil, 1F

Plucinski, Jerzy, 0M

Qi, Te, 14

Quinten, M., 0R

Ramírez, Claudio, 11, 1A

Reiners, Ansgar, 0I

Sakhariyanova, Aiganym M., 0H

Schau, Philipp, 0Z

Shen, Biyao, 1G

Shmytkova, Ekaterina A., 0P

Silver, Richard M., 0V

Skorupski, Krzysztof, 0N

Smekhov, Andrey, 0H

Soskind, M., 1O

Soskind, Y. G., 1O

Stork, Wilhelm, 09, 0G

Strqkowski, Marcin R., 0M

Streck, Andreas, 09

Styles, Iain B., 0X

Swirniak, Grzegorz, 1D

Tan, Yi, 0C

Tolstoba, Nadezhda D., 1N

Trojanowski, Michal, 0M

Turola, Massimo, 0X

Turpin, Alex, 16

Urbach, H. P., 07, 0S

van der Donck, J., 0O

Vannoni, Maurizio, 0A

Wang, Shuai, 0C, 13

Wu, Hongyan, 0L

Wu, Xin, 14

Wurm, Matthias, 0U

Xu, Bing, 13

Xu, Haiyan, 0L

Xu, Xihong, 05

Yang, Lin, 06

Yang, Ping, 0C, 13

Yu, Yingjie, 14

Zeng, Lijiang, 1G

Zhang, Chuanwei, 17, 19

Zhang, Linna, 14

Zhang, Nien Fan, 0V

Zheng, Xuejie, 1A

Zhou, Hui, 0V

Zhu, Yan, 07

Zinchik, Alexander A., 1M

Zverev, Victor, 1I

Conference Committee

Symposium Chairs

Wolfgang Osten, Institut für Technische Optik (Germany)

Gunther Notni, Fraunhofer-Institut für Angewandte Optik und Feinmechanik (Germany)

Andrew John Moore, Heriot-Watt University (United Kingdom)

Conference Chair

Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany)

Conference Co-chairs

Karsten Frenner, Institut für Technische Optik (Germany)

Richard M. Silver, National Institute of Standards and Technology (United States)

Conference Programme Committee

Markus Bär, Physikalisch-Technische Bundesanstalt (Germany)

Jörg Bischoff, Osires Optical Engineering (Germany)

Harald Bosse, Physikalisch-Technische Bundesanstalt (Germany)

Sven Burger, Konrad-Zuse-Zentrum für Informationstechnik (Germany)

Peter Evanschitzky, Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB (Germany)

Christian Hafner, ETH Zürich (Switzerland)

Wolfgang Holzapfel, DR. JOHANNES HEIDENHAIN GmbH (Germany)

Bernd H. Kleemann, Carl Zeiss AG (Germany)

Wolfgang Osten, Institut für Technische Optik (Germany)

Andreas Rathsfeld, Weierstrass-Institut für Angewandte Analysis und Stochastik (Germany)

Thomas Scherübl, Carl Zeiss SMS GmbH (Germany)

Patrick Schiavone, Aselta Nanographics (France)

Irwan D. Setija, ASML Netherlands B.V. (Netherlands)

Michael Totzeck, Carl Zeiss AG (Germany)

Jari Turunen, University of Eastern Finland (Finland)

Frank Wyrowski, Friedrich-Schiller-Universität Jena (Germany)

Session Chairs

1 Scatterometry I

Sven Burger, JCMwave GmbH (Germany)

2 Interferometry and Phase I

Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany)

Christof Pruss, Institut für Technische Optik (Germany)

3 Radiometry and Photometry

Liwei Fu, Universität Stuttgart (Germany)

4 Optical Systems

Wolfgang Holzapfel, DR. JOHANNES HEIDENHAIN GmbH (Germany)

5 Stochastic Scattering and Nanoparticles

Egbert Buhr, Physikalisch-Technische Bundesanstalt (Germany)

6 Optical Material Parameters and Thin Films

Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)

7 Scatterometry II

Bernd Bodermann, Physikalisch-Technische Bundesanstalt (Germany)

8 Microscopy and Imaging

Karsten Frenner, Institut für Technische Optik (Germany)

9 Interferometry and Phase II

Wolfgang Osten, Institut für Technische Optik (Germany)

10 Mueller Polarimetry

Peter Petrik, Research Institute for Technical Physics and Materials Science (Hungary)

© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
} "Front Matter: Volume 9526", Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952601 (21 June 2015); doi: 10.1117/12.2197968; https://doi.org/10.1117/12.2197968

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