14 July 2015 The particle behavior analysis and design in the improvement of KDP finishing
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Abstract
A polymer coating was designed and prepared to modify the surface of CIP to match the hardness of KDP, and deliquescence removal was explored by addition proper water online. The above techniques not only weaken the mechanical scratches and increase removal rate, but also are beneficial for subsequently cleaning. Removal function exhibits particular transitional zone on the edge of finishing spot which clearly demonstrates the existence of different processing mechanisms simultaneously. The figure accuracy and PSD1 of a large-aperture KDP are apparently converged after MRF.
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C. Wang, C. Wang, X. Y. Li , X. Y. Li , F. Ji, F. Ji, Q. L. Wei, Q. L. Wei, Y. F. Zhang, Y. F. Zhang, W. Gao, W. Gao, W. Huang, W. Huang, G. P. Tang, G. P. Tang, } "The particle behavior analysis and design in the improvement of KDP finishing", Proc. SPIE 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers, 95321Z (14 July 2015); doi: 10.1117/12.2186005; https://doi.org/10.1117/12.2186005
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