14 July 2015 Study of hafina-silica mixed coatings with different compositions prepared by E-beam co-evaporation
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Abstract
Hafnia-silica (HfO2/SiO2) mixed thin films with a wide range of different compositions have been deposited on fused silica substrate by E-beam co-evaporation. The change in composition is achieved by changing the deposition rates of individual materials. The transmittance spectra are measured by the spectrometer, and then the refractive indexes are calculated with Essential Macleod. The vertical uniformity and grain structure of the films are analyzed by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The experimental results demonstrate that the coatings have good uniformity, and all the films are amorphous except the pure HfO2 film. In addition, the mixed coating with about 16.85% SiO2 content has a higher refractive index than the pure HfO2 coating.
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Huanbin Xing, Huanbin Xing, Meiping Zhu, Meiping Zhu, Yingjie Chai, Yingjie Chai, Feifei Tu, Feifei Tu, Hu Wang, Hu Wang, Kui Yi, Kui Yi, Jianda Shao, Jianda Shao, } "Study of hafina-silica mixed coatings with different compositions prepared by E-beam co-evaporation", Proc. SPIE 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers, 953226 (14 July 2015); doi: 10.1117/12.2185981; https://doi.org/10.1117/12.2185981
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