Testing Reflective Optical Surfaces With A Non-Contacting Probe

G. Molesini; F. Quercioli; B. Tiribilli; M. Trivi

doi:10.1117/12.947615

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16 January 1989 Testing Reflective Optical Surfaces With A Non-Contacting Probe

G. Molesini, F. Quercioli, B. Tiribilli, M. Trivi

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Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947615
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

An optical device is described that performs height data acquisition by focusing a white light beam at a sample surface and processing the backscattered light. The principle of the operation is based on longitudinal chromatic aberration of the focusing lens and on spectral analysis of the image irradiance. The surface microtopography is reconstructed after automatic point by point scanning. A personal computer interfaced to the probe controls the operation and produces the roughness parameters. Highlights of the optical approach are presented, main system characteristics are given and examples of performance on selected objects are demonstrated.

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G. Molesini, F. Quercioli, B. Tiribilli, and M. Trivi "Testing Reflective Optical Surfaces With A Non-Contacting Probe", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947615

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