Numerical investigation on electrical characterization of a capacitive coupled radio-frequency plasma

H. Yao; X. He; J. P. Chen; Y. C. Zhang

doi:10.1117/12.2182242

4 May 2015 Numerical investigation on electrical characterization of a capacitive coupled radio-frequency plasma

H. Yao, X. He, J. P. Chen, Y. C. Zhang

Proceedings Volume 9543, Third International Symposium on Laser Interaction with Matter; 95430Y (2015) https://doi.org/10.1117/12.2182242
Event: Third International Symposium on Laser Interaction with Matter, 2014, Jiangsu, China

Abstract

This paper presents the main electrical features of capacitive coupled radio-frequency (CCRF) discharges in gas. A two-dimensional, time-dependent fluid model was established. Capacitive coupled plasmas (CCP) were produced by applying radio-frequency voltage to a pair of parallel plate electrodes which are separated from the plasma by dielectric layers. The electron equation and the electron transport equations were solved and yielded the electron number density and electron temperature. The electrostatic field was obtained by the solution of the Poisson equation. The distribution of electron temperature and electron number density was studied under different conditions: radio-frequency applied voltages (V_RF=100-2000V), frequencies (f=3.0-40.68MHz), pressures (p=0.001-1torr), and gas species (O₂, Ar, He, N₂). The results show that electron number density presents a minimum near the electrodes, and presents a maximum between the positive and the negative electrodes. The distinguishing feature of CCP is the presence of oscillating sheaths near electrodes where displacement current dominates conduction current. These informations will help us to analyze the characters of CCP for application.

Citation Download Citation

H. Yao, X. He, J. P. Chen, and Y. C. Zhang "Numerical investigation on electrical characterization of a capacitive coupled radio-frequency plasma", Proc. SPIE 9543, Third International Symposium on Laser Interaction with Matter, 95430Y (4 May 2015); https://doi.org/10.1117/12.2182242

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KEYWORDS

Plasma

Electrodes

Electron transport

Oxygen

Particles

Diffusion

Argon

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