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Metallic nanostructures interact strongly with light through surface plasmon modes and many application fields
have been proposed during the past decade, including light harvesting, sensing and structural colors. However,
their implementation for the industry requires the development of up scalable and cost effective manufacturing
processes. The fabrication at wafer scale of plasmonic nanostructures and metamaterials using nano imprint
lithography is reported. After structuring, the evaporation of various plasmonic materials are performed with a
tilt angle with respect to the substrate, which increases the light interactions with the different metallic layers as
well as enlarges the design possibilities. A step and repeat process is used to increase further the area of nanostructured
surface. The measured optical properties of the fabricated structures show a very good agreement
compared to numerical calculations using the rigorous coupled wave analysis. These numerical calculations together
which structural characterization, increase the process control and enable the design of the nanostructures
for specific applications. In particular, nanostructures with a shape similar to split ring resonators and which
support high order plasmonic modes showing Fano resonances are shown to be promising for sensing applications.
The structures were designed in such a way to have a strong spectral response in the blue/green region of the
visible spectrum. Examples of refractive index sensors and stretch sensors were finally discussed.
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Fabian Lütolf, Guillaume Basset, Daniele Casari, Angélique Luu-Dinh, Benjamin Gallinet, "Plasmonics for the industry," Proc. SPIE 9547, Plasmonics: Metallic Nanostructures and Their Optical Properties XIII, 954717 (28 August 2015); https://doi.org/10.1117/12.2190561