Integrated vapor-liquid-solid silicon mass sensors (Presentation Recording)

Brian A Bryce; Jason J Gorman; Sergiy Keylyuk; Albert Davydov

doi:10.1117/12.2192083

5 October 2015 Integrated vapor-liquid-solid silicon mass sensors (Presentation Recording)

Brian A Bryce, Jason J Gorman, Sergiy Keylyuk, Albert Davydov

Proceedings Volume 9553, Low-Dimensional Materials and Devices; 955304 (2015) https://doi.org/10.1117/12.2192083
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

We present the results and progress of research to create a multiplex chemical sensor based on Au catalyzed vapor-liquid-solid (VLS) silicon nanowires deployed as resonant mass sensors. Each element of this sensor has a single VLS wire grown in close proximity to a Si photodiode. Together they create a Fabry-Pérot interferometer that allows for the sensitive detection of the beam’s resonant motion. Small changes in mass on the cantilever that occur as a result of chemical absorption on the functionalized Au surface shift the resonant frequency. Our integrated approach will allow large reductions in system complexity for this sensor class.

Conference Presentation

Citation Download Citation

Brian A Bryce, Jason J Gorman, Sergiy Keylyuk, and Albert Davydov "Integrated vapor-liquid-solid silicon mass sensors (Presentation Recording)", Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955304 (5 October 2015); https://doi.org/10.1117/12.2192083

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