26 August 2015 Fatigue analysis of chevron structures with Z shape arms
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Abstract
Due to the diversity and multiple energy domains involved, Micro-Electromechanical Systems MEMS devices are vulnerable to several mechanical failures such as fatigue. They been widely used in military applications, radio frequency systems, pressure sensors, automotive industry, among several others. Most MEMS devices contain moving parts that are subjected to cyclic loading, which degrade the device´s efficiency. Due to the high importance of MEMS in various applications, it is necessary to know their lifetime to prevent any damage or process discontinuity to which the system is subject. There have been several investigations in particular on the fatigue analysis in presence of cracks, however in terms of lifetime under cycling load, information is not abundant. The fatigue analysis can be performed for characterizing the ability of materials to support many cycles. Some parts of systems are exposed to strong stress level experiences during its usable lifetime, so the analysis must be focused on them. In this paper, a simulated fatigue analysis of classic, Z-shape and optimized chevron with Z shape arms is shown. Simulations are made using Ansys 15.0, to obtain the arms lifetime of the system because they are subjected to greater stresses in the presence of cyclic loading.
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Margarita Tecpoyotl Torres, Margarita Tecpoyotl Torres, Ramón Cabello Ruiz, Ramón Cabello Ruiz, J. Gerardo Vera Dimas, J. Gerardo Vera Dimas, J. Alfredo Rodriguez Ramirez, J. Alfredo Rodriguez Ramirez, J. Jesus Escobedo Alatorre, J. Jesus Escobedo Alatorre, Alejandra Ocampo Diaz, Alejandra Ocampo Diaz, } "Fatigue analysis of chevron structures with Z shape arms", Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955318 (26 August 2015); doi: 10.1117/12.2187152; https://doi.org/10.1117/12.2187152
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