20 August 2015 All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect
Author Affiliations +
Abstract
We proposed and demonstrated a new all-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect cable in which a vertical light coupler is integrated. The approach potentially cut down the cost by eliminating a metallization process for alignment of multiple masks. Throughout the process we used a polyimide as the substrate, coated by Epoclad as claddings, then AP2210B and WPR 5100 were used to fabricate waveguides and 45 degree mirror couplers, respectively. In addition, precisely aligned mirror couplers to waveguides are achieved by using polymer-based, non-metallic, and transparent phase-based alignment marks. We tested a feature specific phase-based alignment system. In addition, the shape and depth of the phase-based alignment marks are optimized for phase contrast and Schlieren imaging. Our results shows that a contrast of the image is enhanced compared to that of observed by a conventional imaging system. Such process enables to integrate polymer based waveguides by only using the polymer based alignment marks on the WPR 5100 layer.
Conference Presentation
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jilin Yang, Jilin Yang, Tao Ge, Tao Ge, Chris Summitt, Chris Summitt, Sunglin Wang, Sunglin Wang, Tom Milster, Tom Milster, Yuzuru Takashima, Yuzuru Takashima, } "All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560F (20 August 2015); doi: 10.1117/12.2187143; https://doi.org/10.1117/12.2187143
PROCEEDINGS
8 PAGES + PRESENTATION

SHARE
Back to Top