Nanofabrication at 1nm resolution by quantum optical lithography (Presentation Recording)

Eugen Pavel

doi:10.1117/12.2187249

5 October 2015 Nanofabrication at 1nm resolution by quantum optical lithography (Presentation Recording)

Eugen Pavel

Proceedings Volume 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII; 95560L (2015) https://doi.org/10.1117/12.2187249
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

A major problem in the optical lithography was the diffraction limit. Here, we report and demonstrate a lithography method, Quantum Optical Lithography [1,2], able to attain 1 nm resolution by optical means using new materials (fluorescent photosensitive glass-ceramics and QMC-5 resist). The performance is several times better than that described for any optical or Electron Beam Lithography (EBL) methods. In Fig. 1 we present TEM images of 1 nm lines recorded at 9.6 m/s. a) b) Fig. 1 TEM images of: a) multiple 1 nm lines written in a fluorescent photosensitive glass-ceramics sample; b) single 1 nm line written in QMC-5 resist. References [1] E. Pavel, S. Jinga, B.S. Vasile, A. Dinescu, V. Marinescu, R. Trusca and N. Tosa, “Quantum Optical Lithography from 1 nm resolution to pattern transfer on silicon wafer“, Optics and Laser Technology, 60 (2014) 80-84. [2] E. Pavel, S. Jinga, E. Andronescu, B.S. Vasile, G. Kada, A. Sasahara, N. Tosa, A. Matei, M. Dinescu, A. Dinescu and O.R. Vasile, “2 nm Quantum Optical Lithography“, Optics Communications,291 (2013) 259–263

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Eugen Pavel "Nanofabrication at 1nm resolution by quantum optical lithography (Presentation Recording)", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560L (5 October 2015); https://doi.org/10.1117/12.2187249

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KEYWORDS

Optical lithography

Ocean optics

Optical resolution

Electron beam lithography

Nanofabrication

Transmission electron microscopy

Wafer-level optics

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