Mechanical design of a precision linear flexural stage for 3D x-ray diffraction microscope at the Advanced Photon Source

D. Shu; W. Liu; S. Kearney; J. Anton; J. Z. Tischler

doi:10.1117/12.2189311

2 September 2015 Mechanical design of a precision linear flexural stage for 3D x-ray diffraction microscope at the Advanced Photon Source

D. Shu, W. Liu, S. Kearney, J. Anton, J. Z. Tischler

Author Affiliations +

Proceedings Volume 9573, Optomechanical Engineering 2015; 95730S (2015) https://doi.org/10.1117/12.2189311
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

The 3-D X-ray diffraction microscope is a new nondestructive tool for the three-dimensional characterization of mesoscopic materials structure. A flexural-pivot-based precision linear stage has been designed to perform a wire scan as a differential aperture for the 3-D diffraction microscope at the Advanced Photon Source, Argonne National Laboratory. The mechanical design and finite element analyses of the flexural stage, as well as its initial mechanical test results with laser interferometer are described in this paper.

Citation Download Citation

D. Shu, W. Liu, S. Kearney, J. Anton, and J. Z. Tischler "Mechanical design of a precision linear flexural stage for 3D x-ray diffraction microscope at the Advanced Photon Source", Proc. SPIE 9573, Optomechanical Engineering 2015, 95730S (2 September 2015); https://doi.org/10.1117/12.2189311

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