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2 September 2015 Mechanical design of a precision linear flexural stage for 3D x-ray diffraction microscope at the Advanced Photon Source
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Abstract
The 3-D X-ray diffraction microscope is a new nondestructive tool for the three-dimensional characterization of mesoscopic materials structure. A flexural-pivot-based precision linear stage has been designed to perform a wire scan as a differential aperture for the 3-D diffraction microscope at the Advanced Photon Source, Argonne National Laboratory. The mechanical design and finite element analyses of the flexural stage, as well as its initial mechanical test results with laser interferometer are described in this paper.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Shu, W. Liu, S. Kearney, J. Anton, and J. Z. Tischler "Mechanical design of a precision linear flexural stage for 3D x-ray diffraction microscope at the Advanced Photon Source", Proc. SPIE 9573, Optomechanical Engineering 2015, 95730S (2 September 2015); https://doi.org/10.1117/12.2189311
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