The radius of curvature is one of the most important specifications for spherical optics . There are several methods and devices currently on the market that can be used to measure it, including optical level, non-contact laser interferometer (Interferometer), a probe-contact profiler (Profilometer), the centering machine and three-point contact ball diameter meter (Spherometer). The amount that can be measured with a radius of curvature of the lens aperture range depends on the interferometer standard lens f / number and lens of R / number (radius of curvature divided by the clear aperture of the spherical surface ratio between them). Unfortunately, for lens with diameter greater than 300 mm, the device is limited by the size of the holding fixture lenses or space. This paper aims to provide a novel surface contour detection method and machine, named “CMM spherometry by probe compensation,” to measure the radius and thickness of the curvature of the optical surface by a coordinate measurement machine (CMM). In order to obtain more accurate optimization results, we used probe and temperature compensation to discuss the effect. The trace samples and the measurement results of CMM and the centering machine, which has top and bottom autocollimators, are compared.