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27 August 2015 Surface errors in the course of machining precision optics
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Precision optical components are usually machined by grinding and polishing in several steps with increasing accuracy. Spherical surfaces will be finished in a last step with large tools to smooth the surface. The requested surface accuracy of non-spherical surfaces only can be achieved with tools in point contact to the surface. So called mid-frequency errors (MSFE) can accumulate with zonal processes. This work is on the formation of surface errors from grinding to polishing by conducting an analysis of the surfaces in their machining steps by non-contact interferometric methods. The errors on the surface can be distinguished as described in DIN 4760 whereby 2nd to 3rd order errors are the so-called MSFE. By appropriate filtering of the measured data frequencies of errors can be suppressed in a manner that only defined spatial frequencies will be shown in the surface plot. It can be observed that some frequencies already may be formed in the early machining steps like grinding and main-polishing. Additionally it is known that MSFE can be produced by the process itself and other side effects. Beside a description of surface errors based on the limits of measurement technologies, different formation mechanisms for selected spatial frequencies are presented. A correction may be only possible by tools that have a lateral size below the wavelength of the error structure. The presented considerations may be used to develop proposals to handle surface errors.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Biskup, A. Haberl, and R. Rascher "Surface errors in the course of machining precision optics", Proc. SPIE 9575, Optical Manufacturing and Testing XI, 95750O (27 August 2015);


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