1 September 2015 Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes
Author Affiliations +
Abstract
This work reports on the development of a binary pseudo-random test sample optimized to calibrate the MTF of optical microscopes. The sample consists of a number of 1-D and 2-D patterns, with different minimum sizes of spatial artifacts from 300 nm to 2 microns. We describe the mathematical background, fabrication process, data acquisition and analysis procedure to return spatial frequency based instrument calibration. We show that the developed samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ian Lacey, Ian Lacey, Erik H. Anderson, Erik H. Anderson, Nikolay A. Artemiev, Nikolay A. Artemiev, Sergey Babin, Sergey Babin, Stefano Cabrini, Stefano Cabrini, Guiseppe Calafiore, Guiseppe Calafiore, Elaine R. Chan, Elaine R. Chan, Wayne R. McKinney, Wayne R. McKinney, Christophe Peroz, Christophe Peroz, Peter Z. Takacs, Peter Z. Takacs, Valeriy V. Yashchuk, Valeriy V. Yashchuk, } "Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes", Proc. SPIE 9576, Applied Advanced Optical Metrology Solutions, 957608 (1 September 2015); doi: 10.1117/12.2185191; https://doi.org/10.1117/12.2185191
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT


Back to Top