MZP design and fabrication for efficient hard x-ray nano-focusing and imaging

Christian Eberl; Markus Osterhoff; Florian Döring; Hans-Ulrich Krebs

doi:10.1117/12.2187788

26 August 2015 MZP design and fabrication for efficient hard x-ray nano-focusing and imaging

Christian Eberl, Markus Osterhoff, Florian Döring, Hans-Ulrich Krebs

Proceedings Volume 9588, Advances in X-Ray/EUV Optics and Components X; 958808 (2015) https://doi.org/10.1117/12.2187788
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Efficient focusing optics are a key ingredient for high-resolution (few nanometer) hard x-ray imaging. In recent years, a combined optical scheme using prefocusing to match the coherent fraction of the synchrotron’s x-ray beam to a high-resolution multilayer zone plate (MZP) has been presented. This scheme allows sub-5 nm focusing of hard x-rays in two dimensions. Nevertheless, the first lenses prepared by pulsed laser deposition of alternating WW and Si layers were limited by a low deposition rate of W and the formation of lots of Si-droplets during film growth. Thus, the material combination has been changed to Ta₂O₅ and ZrO₂, allowing a much faster and more accurate layer growth. Here we present latest developments achieved in both design and fabrication of high-resolution MMZPs: A MZP with a lens diameters of about 15 micrometers, sharp layer interfaces, 5 nm outermost zone widths and a focal length of 0.5 mm. Too increase the focusing efficiency even more, a tilted geometry using a pulled glass fibre was successfully implemented.

Citation Download Citation

Christian Eberl, Markus Osterhoff, Florian Döring, and Hans-Ulrich Krebs "MZP design and fabrication for efficient hard x-ray nano-focusing and imaging", Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 958808 (26 August 2015); https://doi.org/10.1117/12.2187788

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