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26 August 2015 Evaluation of surface figure error profile of ellipsoidal mirror for soft x-ray focusing
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Abstract
It is possible to achieve soft X-ray nanofocusing with a high efficiency and no chromatic aberration by using an ultraprecise ellipsoidal mirror. Surface figure metrology is key in the improvement of surface figure accuracy. In this study, we propose a ptychographic phase retrieval method using a visible light laser to measure the surface figure error profile of an ellipsoidal mirror. We introduce a simple experimental system for ptychographic phase retrieval and demonstrate the basic performance of the proposed system. Obtainable wavefront information provides both the figure error and the alignment of the ellipsoidal mirror that yield the best focusing. This developed method is required for offline adjustments when an ellipsoidal mirror is installed in the beamline of synchrotron radiation or X-ray free-electron laser light sources.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoko Takeo, Takahiro Saito, and Hidekazu Mimura "Evaluation of surface figure error profile of ellipsoidal mirror for soft x-ray focusing", Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 95880A (26 August 2015); https://doi.org/10.1117/12.2188824
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