Hard x-ray nanoprobe by Montel KB mirrors at Taiwan Photon Source

Gung-Chian Yin; Shi-Hung Chang; Bo-Yi Chen; Huang-Yeh Chen; Bi-Hsuan Lin; Shao-Chin Tseng; Chian-Yao Lee; Jian-Xing Wu; Shao-Yun Wu; Mau-Tsu Tang

doi:10.1117/12.2189985

18 September 2015 Hard x-ray nanoprobe by Montel KB mirrors at Taiwan Photon Source

Gung-Chian Yin, Shi-Hung Chang, Bo-Yi Chen, Huang-Yeh Chen, Bi-Hsuan Lin, Shao-Chin Tseng, Chian-Yao Lee, Jian-Xing Wu, Shao-Yun Wu, Mau-Tsu Tang

Author Affiliations +

Proceedings Volume 9592, X-Ray Nanoimaging: Instruments and Methods II; 959204 (2015) https://doi.org/10.1117/12.2189985
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

The hard X-ray nanoprobe at Taiwan Photon Source (TPS) makes use of the large numerical aperture obtained by nested Montel mirrors. To fully uptake the focusing power and flux, these mirrors requires the surface slope error no less than 0.05 μrad and are symmetrically placed with a 45 degrees cut for perfect surface matching. The beamline optics is designed to take the advantage of the symmetry of mirrors such that a round focal spot is accomplished. The final size of the focus spot are simulated below 40 nm at 9-15 keV. The whole facility including the beamline and the stations will be operated under vacuum to preserve photon coherence as well as to prevent the system from unnecessary environmental interference. The station equips with multimodal x-ray probes, including XRF, XAS, XEOL, projection microscope, CDI, etc. A SEM in close cooperation with laser interferometers is equipped to precisely locate the position of the sample. The beamline and the station are scheduled to be in commissioning phase in 2016.

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Gung-Chian Yin, Shi-Hung Chang, Bo-Yi Chen, Huang-Yeh Chen, Bi-Hsuan Lin, Shao-Chin Tseng, Chian-Yao Lee, Jian-Xing Wu, Shao-Yun Wu, and Mau-Tsu Tang "Hard x-ray nanoprobe by Montel KB mirrors at Taiwan Photon Source", Proc. SPIE 9592, X-Ray Nanoimaging: Instruments and Methods II, 959204 (18 September 2015); https://doi.org/10.1117/12.2189985

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